Texture of Cu and dilute binary Cu-alloy films: Impact of annealing and solute content
- K. Barmak
- A. Gungor
- et al.
- 2003
- Materials Science in Semiconductor Processing
Publications
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22 results for K. Barmak
Annealing behavior of Cu and dilute Cu-alloy films: Precipitation, grain growth, and resistivity
- K. Barmak
- A. Gungor
- et al.
- 2003
- Journal of Applied Physics
Texture and resistivity of dilute binary Cu(Al), Cu(In), Cu(Ti), Cu(Nb), Cu(Ir), and Cu(W) allow thin films
- A. Gungor
- K. Barmak
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Metastable and equilibrium phase formation in sputter-deposited Ti/Al multilayer thin films
- G.A. Lucadamo
- K. Barmak
- et al.
- 2002
- Journal of Applied Physics
Texture in Ti/Al and Nb/Al multilayer thin films: Role of Cu
- G.A. Lucadamo
- Katayun Barmak
- et al.
- 2001
- Journal of Materials Research
Dissociation of dilute immiscible copper alloy thin films
- K. Barmak
- G.A. Lucadamo
- et al.
- 2000
- Journal of Applied Physics
Evidence of a two-stage reaction mechanism in sputter deposited Nb/Al multilayer thin-films studied by in situ synchrotron X-ray diffraction
- G.A. Lucadamo
- K. Barmak
- et al.
- 1999
- Materials Letters
Two-dimensional profiling of shallow junctions in Si metal-oxide-semiconductor structures using scanning tunneling spectroscopy and transmission electron microscopy
- E.T. Yu
- K. Barmak
- et al.
- 1996
- Journal of Applied Physics
Formation of a C49 TiGe2 phase during annealing a coevaporated Ti0.33Ge0.67 alloy
- Q.Z. Hong
- K. Barmak
- et al.
- 1993
- Applied Physics Letters
Crystallization of coevaporated and ion-irradiated amorphous CoSi 2
- Q.Z. Hong
- K. Barmak
- et al.
- 1993
- Journal of Applied Physics