Fabrication of high performance 512Kb SRAMs in 0.25 μm CMOS technology using x-ray lithography
- R. Viswanathan
- David Seeger
- et al.
- 1994
- Microelectronic Engineering
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13 results for P.G. Blauner
Electromigration failure due to interfacial diffusion in fine Al alloy lines
- C.-K. Hu
- M.B. Small
- et al.
- 1993
- Applied Physics Letters
Focused ion beam imaging of grain growth in copper thin films
- J. Gupta
- J.M.E. Harper
- et al.
- 1992
- Applied Physics Letters