Elecromigration damage in fine Al alloy lines due to interfacial diffusion
- C.-K. Hu
- M.B. Small
- et al.
- 1993
- MRS Proceedings 1993
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13 results for P.G. Blauner
Focused ion beam imaging of grain growth in copper thin films
- J. Gupta
- J.M.E. Harper
- et al.
- 1992
- Applied Physics Letters
Model for focused ion beam deposition
- J.P. Levin
- P.G. Blauner
- et al.
- 1990
- Microlithography 1990