Dual-stage servo controller for HDD using MEMS microactuator
- Tetsuo Semba
- Toshiki Hirano
- et al.
- 1999
- IEEE Transactions on Magnetics
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18 results for Toshiki Hirano
High-bandwidth HDD Tracking Servo by a Moving-slider Micro-actuator
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1999
- IEEE Transactions on Magnetics
Electrostatic microactuator and design considerations for HDD applications
- L.-S. Fan
- T. Hirano
- et al.
- 1999
- IEEE Transactions on Magnetics
High-bandwidth high-accuracy rotary microactuators for magnetic hard disk drive tracking servos
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- IEEE/ASME TMECH
MEMS milliactuator for hard-disk-drive tracking servo
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- JMEMS
Dry-released nickel micromotors with low-friction bearing structure
- T. Hirano
- T. Furuhata
- et al.
- 1995
- IEICE Transactions on Electronics
Electroplated and dry-released metallic microstructures for a lateral tunneling unit application
- Toshiki Hirano
- Dai Kobayashi
- et al.
- 1994
- Japanese Journal of Applied Physics
Design, fabrication, and operation of submicron gap comb-drive microactuators
- Toshiki Hirano
- Tomotake Furuhata
- et al.
- 1992
- JMEMS