Toshiki Hirano
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Making submicron interelectrode gaps is the key to reducing the driving voltage of a micro comb-drive electrostatic actuator. Two new fabrication technologies, oxidation machining and a post-release positioning method, are proposed to realize submicron gaps. Two types of actuator (a resonant type and a nonresonant type) with submicron gaps were successfully fabricated and their operational characteristics were tested experimentally. The drive voltage was found to be lower than that of existing actuators. The Appendix discusses the stability of comb-drive actuators. © 1992, IEEE. All rights reserved.
Toshiki Hirano
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Toshiki Hirano, Matthew White, et al.
IMECE 2001
Toshiki Hirano, Long-Sheng Fan, et al.
IMECE 1998
Toshiki Hirano, Long-Sheng Fan, et al.
IEEE Transactions on Magnetics