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Cyril Cabrai Jr.- Simone Raoux
- Cyril Cabrai Jr.
- et al.
- 2009
- MRS Spring Meeting 2009
- Jakub Kedzierski
- Edward Nowak
- et al.
- 2002
- IEDM 2002
- K.N. Chen
- L. Krusin-Elbaum
- et al.
- 2006
- NVSMW 2006
- C. Detavernier
- D. Deduytsche
- et al.
- 2006
- ECS Meeting 2006
- K. Fröhlich
- K. Hušeková
- et al.
- 2004
- Materials Science in Semiconductor Processing
- C. Engström
- J. Birch
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
- K.L. Saenger
- A. Grill
- et al.
- 1998
- Journal of Materials Research