Publications

2 results for Mikko Heikkilä

Atomic layer deposition of materials for phase-change memories
- - Markku Leskelä
  - Viljami Pore
  - et al.
- 2009
- ECS Meeting 2009
Atomic layer deposition of Ge₂Sb₂Te₅ thin films
- - Mikko Ritala
  - Viljami Pore
  - et al.
- 2009
- Microelectronic Engineering