Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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15 results for A. Cowley

Measurements of effective thermal conductivity for advanced interconnect structures with various composite low-K dielectrics
- - F. Chen
  - J. Gill
  - et al.
- 2004
- IRPS 2004
Comprehensive reliability evaluation of a 90 nm CMOS technology with Cu/PECVD low-k BEOL
- - D. Edelstein
  - H.S. Rathore
  - et al.
- 2004
- IRPS 2004
Measurements of effective thermal conductivity for advanced interconnect structures with various composite low-k dielectrics
- - F. Chen
  - J. Gill
  - et al.
- 2004
- IRPS 2004
A 90nm dual damascene hybrid (organic / inorganic) low-k - Copper BEOL integration scheme
- - T. Dalton
  - A. Cowley
  - et al.
- 2003
- ADMETA 2003
A high performance 0.13 μm copper BEOL technology with low-k dielectric
- - R.D. Goldblatt
  - B.N. Agarwala
  - et al.
- 2000
- IITC 2000