Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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14 results for K. Kumar

Ash-induced modification of porous and dense SiCOH inter-level-dielectric (ILD) materials during damascene plasma processing
- - T. Dalton
  - N. Fuller
  - et al.
- 2004
- IITC 2004
Porous ILD process development for sub 100nm integration
- - K. Malone
  - S.T. Chen
  - et al.
- 2003
- ADMETA 2003
A 90nm dual damascene hybrid (organic / inorganic) low-k - Copper BEOL integration scheme
- - T. Dalton
  - A. Cowley
  - et al.
- 2003
- ADMETA 2003
The study of modified layers in SiCOH dielectrics using spectroscopic ellipsometry
- - Marcus A. Worsley
  - Stacey F. Bent
  - et al.
- 2003
- MRS Proceedings 2003