Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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6 results for J.A. Lubguban

Supercritical CO₂ treatments for semiconductor applications
- - S. Gangopadhyay
  - J.A. Lubguban
  - et al.
- 2004
- MRS Proceedings 2004
Creating nanoporosity by selective extraction of porogens using supercritical carbon dioxide/cosolvent processes
- - B. Lahlouh
  - T. Rajagopalan
  - et al.
- 2003
- MRS Proceedings 2003
Supercritical CO₂/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films
- - A.A. Lubguban
  - J.A. Lubguban
  - et al.
- 2008
- Thin Solid Films
Characterization of porous low- k films using variable angle spectroscopic ellipsometry
- - M.T. Othman
  - J.A. Lubguban
  - et al.
- 2006
- Journal of Applied Physics
Supercritical CO₂ extraction of porogen phase: An alternative route to nanoporous dielectrics
- - J.A. Lubguban
  - S. Gangopadhyay
  - et al.
- 2004
- Journal of Materials Research
Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
- - T. Rajagopalan
  - B. Lahlouh
  - et al.
- 2003
- Applied Physics Letters