Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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14 results for Chanro Park

Plasma treatment effect on gate stack electrical properties
- - Tao Li
  - Chanro Park
  - et al.
- 2018
- ANTS 2018
Process Challenges in Fully Aligned Via Integration for sub 32 nm Pitch BEOL
- - Benjamin D. Briggs
  - C.B. Pcethala
  - et al.
- 2018
- IITC 2018
E-beam inspection of EUV mask defects: To etch or not to etch?
- - Ravi Bonam
  - Hung-Yu Tien
  - et al.
- 2014
- SPIE Advanced Lithography 2014
Improved Air Spacer for Highly Scaled CMOS Technology
- - Kangguo Cheng
  - Chanro Park
  - et al.
- 2020
- IEEE Transactions on Electron Devices