Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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17 results for Vimal Kamineni

Tungsten and cobalt metallization: A material study for MOL local interconnects
- - Vimal Kamineni
  - Mark Raymond
  - et al.
- 2016
- IITC/AMC 2016
Silicon fin line edge roughness determination and sensitivity analysis by Mueller matrix spectroscopic ellipsometry based scatterometry
- - Dhairya Dixit
  - Samuel O'Mullane
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Annealing and impurity effects in co thin films for MOL Contact and BEOL metallization
- - James Kelly
  - Vimal Kamineni
  - et al.
- 2018
- JES
Defect and grain boundary scattering in tungsten: A combined theoretical and experimental study
- - Nicholas A. Lanzillo
  - H. Dixit
  - et al.
- 2018
- Journal of Applied Physics
First-Principles Investigations of TiGe/Ge Interface and Recipes to Reduce the Contact Resistance
- - H. Dixit
  - Chengyu Niu
  - et al.
- 2017
- IEEE T-ED
Impact of surface preparation for n-type Si:P and p-type SiGe:B semiconductors on low resistance silicide contacts
- - A. Carr
  - B. Peethala
  - et al.
- 2017
- Microelectronic Engineering
Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology
- - Dhairya Dixit
  - Samuel O'Mullane
  - et al.
- 2015
- J. Micro/Nanolithogr. MEMS MOEMS