Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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27 results for Laertis Economikos

A 90nm dual damascene hybrid (organic / inorganic) low-k - Copper BEOL integration scheme
- - T. Dalton
  - A. Cowley
  - et al.
- 2003
- ADMETA 2003
Structural demonstration of cost effective Isolation Trench fill for sub-110nm vertical trench DRAM and SOC applications
- - S.-W. Yang
  - W.-S. Liao
  - et al.
- 2003
- VLSI-TSA 2003
Study of arsenic out-diffusion for buried plate formation in trench capacitors
- - L. Economikos
  - C.S. Murthy
  - et al.
- 1998
- IEMT 1998
Applications of latent open test
- - Laertis Economikos
  - Shinwu Chiang
  - et al.
- 1994
- MCMC 1994
Post cu cmp cleaning of polyurethane pad debris
- - Wei-Tsu Tseng
  - Elliott Rill
  - et al.
- 2013
- ECS J. Solid State Sci. Technol.
Post copper CMP hybrid clean process for advanced BEOL technology
- - Wei-Tsu Tseng
  - Vamsi Devarapalli
  - et al.
- 2013
- IEEE Trans Semicond Manuf
Enabling scatterometry as an in-line measurement technique for 32 nm BEOL application
- - M. Golam Faruk
  - Shahin Zangooie
  - et al.
- 2011
- IEEE Trans Semicond Manuf