Epitaxial graphene nanoribbon array fabrication using BCP-assisted nanolithography
- Guanxiong Liu
- Yanqing Wu
- et al.
- 2012
- ACS Nano
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155 results for Alfred Grill
In situ Co/SiC(N,H) capping layers for Cu/Low-k interconnects
- Chih-Chao Yang
- B. Li
- et al.
- 2012
- IEEE Electron Device Letters
Wafer-scale graphene integrated circuit
- Yu-Ming Lin
- Alberto Valdes-Garcia
- et al.
- 2011
- Science
Low dielectric constant SiCOH films as potential candidates for interconnect dielectrics
- A. Grill
- L. Perraud
- et al.
- 1999
- MRS Spring Meeting 1999
Electrode structures for integration of ferroelectric or high dielectric constant films in semiconductor devices
- Alfred Grill
- 1998
- MRS Fall Meeting 1998
Germanium-on-insulator photodetectors
- S.J. Koester
- G. Dehlinger
- et al.
- 2005
- GFP 2005
Optimal filler sizes for thermal interface materials
- Piyas Chowdhury
- Kamal Sikka
- et al.
- 2019
- ITherm 2019
Comparison of key fine-line BEOL metallization schemes for beyond 7 nm node
- Takeshi Nogami
- X. Zhang
- et al.
- 2017
- VLSI Technology 2017
Post porosity plasma protection integration at 48 nm pitch
- H. Huang
- Krystelle Lionti
- et al.
- 2016
- IITC/AMC 2016
Ultrathin conformal multilayer SiNO dielectric cap for capacitance reduction in Cu/low k interconnects
- Deepika Priyadarshini
- Son Van Nguyen
- et al.
- 2016
- IITC/AMC 2016