Ultrathin (5-35 nm) SiCNH dielectrics for damascene Cu Cap application: Thickness scaling and oxidation barrier performance limitation
- Son Nguyen
- T. Haigh Jr.
- et al.
- 2010
- ECS Meeting 2010
Publications
Date
Featured collections
Popular topics
155 results for Alfred Grill
Multicarrier transport in epitaxial multilayer graphene
- Yu-Ming Lin
- Christos Dimitrakopoulos
- et al.
- 2010
- Applied Physics Letters
Wafer-scale epitaxial graphene growth on the Si-face of hexagonal SiC (0001) for high frequency transistors
- Christos Dimitrakopoulos
- Yu-Ming Lin
- et al.
- 2010
- Journal of Vacuum Science and Technology B
In situ x-ray diffraction study of graphitic carbon formed during heating and cooling of amorphous-C/Ni bilayers
- Katherine Saenger
- James C. Tsang
- et al.
- 2010
- Applied Physics Letters
Silane decomposition on Cu interconnects inhibited by ammonia
- E. Todd Ryan
- Steven Molis
- et al.
- 2010
- JES
Graphene RF transistor performance
- Keith A. Jenkins
- Yu-Ming Lin
- et al.
- 2010
- ECS Transactions
X-ray scattering methods for porosity metrology of low-k thin films
- C.M. Settens
- V.K. Kamineni
- et al.
- 2009
- FCMN 2009
Spectroscopic ellipsometry of porous low-κ dielectric thin films
- V.K. Kamineni
- C.M. Settens
- et al.
- 2009
- FCMN 2009
Integration compatible porous SiCOH dielectrics from 45 to 22 nm
- S. Gates
- A. Grill
- et al.
- 2008
- ADMETA 2008
Adjusting the skeleton and pore structure of porous SiCOH dielectrics
- S. Gates
- G. Dubois
- et al.
- 2009
- JES