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Linda K. Sundberg- Maxwell J. Giammona
- Jangwoo Kim
- et al.
- 2023
- Advanced Materials Interfaces
- Andrea Fasoli
- L. Thornquist
- et al.
- 2019
- ISOEN 2019
- Andrea Fasoli
- Krystelle Lionti
- et al.
- 2017
- ISOEN 2017
- Krystelle Lionti
- Andrea Fasoli
- et al.
- 2017
- TechConnect 2017
- Linda K. Sundberg
- Gregory M. Wallraff
- et al.
- 2014
- SPIE Advanced Lithography 2014
- M.I. Sanchez
- L.K. Sundberg
- et al.
- 2013
- SPIE Photomask Technology + EUV Lithography 2013
- M.I. Sanchez
- L.K. Sundberg
- et al.
- 2013
- SPIE Advanced Lithography 2013
- Ramakrishnan Ayothi
- Lovejeet Singh
- et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
- Luisa D. Bozano
- Ratnam Sooriyakumaran
- et al.
- 2012
- SPIE Photomask Technology + EUV Lithography 2012
- Luisa D. Bozano
- Ratnam Sooriyakumaran
- et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012