Thermal Scanning Probe Lithography (t-SPL) for Nano-Fabrication
- Heiko Wolf
- Yu Kyoung Ryu
- et al.
- 2019
- Pan Pacific 2019
Publications
Date
Featured collections
Popular topics
13 results for Felix Holzner
PVD prepared molecular glass resists for scanning probe lithography
- Christian Neuber
- Hans-Werner Schmidt
- et al.
- 2016
- SPIE Advanced Lithography 2016
Thermal probe nanolithography for novel photonic devices
- Felix Holzner
- Philip Paul
- et al.
- 2015
- IPRSN 2015
Precision positioning for thermal scanning probe lithography
- Philip Paul
- Simon Züst
- et al.
- 2015
- EUSPEN 2015
Closed-loop high-speed 3D thermal probe nanolithography
- Armin W. Knoll
- Michal Zientek
- et al.
- 2014
- SPIE Advanced Lithography 2014
Thermal probe nanolithography: In-situ inspection, high-speed, high-resolution, 3D
- Felix Holzner
- Philip Paul
- et al.
- 2013
- EMLC 2013
Direct Write 3-dimensional nanopatterning using probes
- Armin Knoll
- Felix Holzner
- et al.
- 2010
- FNANO 2010
The nanofluidic confinement apparatus: Studying confinement-dependent nanoparticle behavior and diffusion
- Stefan Fringes
- Felix Holzner
- et al.
- 2018
- Beilstein Journal of Nanotechnology
Thermal probe maskless lithography for 27.5 nm half-pitch Si technology
- Lin Lee Cheong
- Philip Paul
- et al.
- 2013
- Nano Letters
Field stitching in thermal probe lithography by means of surface roughness correlation
- Ph. Paul
- A.W. Knoll
- et al.
- 2012
- Nanotechnology