Publications

3 results for Ahmed Seoud

The effect of the OPC parameters on the performance of the OPC model
- - Amr Abdo
  - Ahmed Seoud
  - et al.
- 2007
- SPIE Photomask Technology + EUV Lithography 2007
Setting MRC rules: Balancing inspection capabilities, defect sensitivity and OPC
- - Ian Stobert
  - James Bruce
  - et al.
- 2007
- SPIE Advanced Lithography 2007
The effect of OPC optical and resist model parameters on the model accuracy, run time, and stability
- - Amr Abdo
  - Rami Fathy
  - et al.
- 2006
- SPIE Photomask Technology 2006