The effect of the OPC parameters on the performance of the OPC model
- Amr Abdo
- Ahmed Seoud
- et al.
- 2007
- SPIE Photomask Technology + EUV Lithography 2007
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3 results for Ahmed Seoud
Setting MRC rules: Balancing inspection capabilities, defect sensitivity and OPC
- Ian Stobert
- James Bruce
- et al.
- 2007
- SPIE Advanced Lithography 2007
The effect of OPC optical and resist model parameters on the model accuracy, run time, and stability
- Amr Abdo
- Rami Fathy
- et al.
- 2006
- SPIE Photomask Technology 2006