TiN surface dynamics: Role of surface and bulk mass transport processes
- J. Bareño
- S. Kodambaka
- et al.
- 2006
- Advanced Summer School in Physics 2006
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4 results for I. Petrov
Synchrotron x-ray diffraction and transmission electron microscopy studies of interfacial reaction paths and kinetics during annealing of fully-002-textured Al/TiN bilayers
- J.-S. Chun
- J.R.A. Carlsson
- et al.
- 2001
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Development of 111 texture in Al films grown on SiO2/Si(001) by ultrahigh-vacuum primary-ion deposition
- Y.W. Kim
- I. Petrov
- et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Directed sputter deposition of AlCu: Film microstructure and microchemistry
- S.M. Rossnagel
- J. Moser
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films