A. Reisman, M. Berkenblit, et al.
JES
The interfacial reaction paths and kinetics in highly 002-textured Al/TiN bilayers, grown on SiO2, were studied. It was found that TiN barrier failure is initiated at the Al/TiN interface with the formation of a thin continuous AlN interfacial layer which is initially in the metastable zinc-blende structure through a local epitaxial relationship with the underlying TiN.
A. Reisman, M. Berkenblit, et al.
JES
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications