A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
The interfacial reaction paths and kinetics in highly 002-textured Al/TiN bilayers, grown on SiO2, were studied. It was found that TiN barrier failure is initiated at the Al/TiN interface with the formation of a thin continuous AlN interfacial layer which is initially in the metastable zinc-blende structure through a local epitaxial relationship with the underlying TiN.
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications