Continuum model of shot noise and line edge roughness
- G.M. Gallatin
- 2001
- Microelectronic and MEMS Technologies 2001
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16 results for Gregg M. Gallatin
Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes
- Dario L. Goldfarb
- Arpan P. Mahorowala
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Line-edge roughness transfer function and its application to determining mask effects in EUV resist characterization
- Patrick P. Naulleau
- Gregg M. Gallatin
- 2003
- Applied Optics
EUV photoresist performance results from the VNL and the EUV LLC
- Jonathan Cobb
- Paul Dentinger
- et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
High-numerical-aperture scalar imaging
- Gregg M. Gallatin
- 2001
- Applied Optics
Generalized Goldstone theorem: Automatic imposition of the Higgs mechanism and application to scale and conformal symmetry breaking
- A. Chodos
- G.M. Gallatin
- 2001
- Journal of Mathematical Physics