Influence of substrate temperature during sputter deposition on the subsequent formation of titanium disilicide
- A.S. Özean
- K.F. Ludwig Jr.
- et al.
- 2002
- MRS Proceedings 2002
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Axiotaxy of CoSi 2 thin films on Si(100) substrates and the effects of Ti alloying
- Ahmet S. Özean
- Karl F. Ludwig Jr.
- et al.
- 2004
- Journal of Applied Physics