Karl F. Ludwig Jr., Byungwoo Park
Physical Review Letters
The occurrence of axiotaxy in CoSi 2 thin films on Si(100) substrates and the effects of Ti alloying were discussed. The influence of Ti alloying was investigated by using in situ x-ray diffraction measurements, as well as pole figure analysis. It was found that the nucleation of both the CoSi and CoSi 2 phases is delayed to higher temperatures for the 5 at.% Ti alloyed films. It was also found that the texture of the CoSi 2 phase is also influenced by the addition of Ti.
Karl F. Ludwig Jr., Byungwoo Park
Physical Review Letters
Byungwoo Park, G. Brian Stephenson, et al.
Physical Review Letters
Simon Gaudet, Christian Lavoie, et al.
ISTDM 2006
Qinghuang Lin, Chuck Black, et al.
Microlithography 2003