Simulation of the deposition of BCC metals including anistropic effects using 3D-films
- T. Smy
- R.V. Joshi
- 2003
- AMC 2003
Publications
Date
Featured collections
Popular topics
4 results for T. Smy
Backend implications for thermal effects in 3d integrated soi structures
- D. Celo
- R.V. Joshi
- et al.
- 2003
- AMC 2003
Modeling 3D effects of substrate topography on step coverage and film morphology of thin metal films
- T. Smy
- S.K. Dew
- et al.
- 2002
- Thin Solid Films
An analysis of the role of high energy neutral bombardment in longthrow/collimated sputtering of refractory metal barrier layers
- T. Smy
- R.V. Joshi
- et al.
- 1998
- Journal of Applied Physics