Compact copper/epoxy-based electromagnetic scanner for scanning probe applications
- H. Rothuizen
- M. Despont
- et al.
- 2002
- MEMS 2002
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5 results for G. Genolet
Micromachined photoplastic probe for scanning near-field optical microscopy
- G. Genolet
- M. Despont
- et al.
- 2001
- Review of Scientific Instruments
All-photoplastic, soft cantilever cassette probe for scanning force microscopy
- G. Genolet
- M. Despont
- et al.
- 2000
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Fabrication of a micromachined magnetic X/Y/Z scanner for parallel scanning probe applications
- H. Rothuizen
- U. Drechsler
- et al.
- 2000
- Microelectronic Engineering
Soft, entirely photoplastic probes for scanning force microscopy
- G. Genolet
- J. Brugger
- et al.
- 1999
- Review of Scientific Instruments