G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
This paper presents the fabrication and characteristics of a magnetically actuated micromechanical scanner/stage with five degrees of freedom (X, Y, Z, and tilt about the X and Y axes) intended for use as a compact positioning device in parallel scanning probe applications. The entire scanner has a volume of 30×30×2 mm3. It shows a DC displacement amplitude to drive current ratio of 330 nm/mA along the X and Y axes, of 50 nm/mA along the Z axis, and has a resonant frequency in the X/Y plane of 61 Hz.
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
R. Ghez, M.B. Small
JES
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007