Publications

2 results for Laurie Beu

Characterization of iodoheptafluoropropane as a dielectric etchant. I. Process performance evaluation
- - Simon Karecki
  - Ritwik Chatterjee
  - et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Plasma abatement reduces PFC emission
- - Victor Vartanian
  - Laurie Beu
  - et al.
- 2000
- Semiconductor International