Mechanical and dielectric characterization of low-k, porous organosilicates
- Willi Volksen
- Teddie P. Magbitang
- et al.
- 2005
- VMIC 2005
Publications
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156 results for Willi Volksen
New spin-on oxycarbosilane low-k dielectric materials with exceptional mechanical properties
- Dubois Geraud
- Teddie Magbitang
- et al.
- 2005
- VMIC 2005
Templating organosilicate vitrification using unimolecular self-organizing polymers prepared from tandem ring opening and atom transfer radical polymerizations
- T. Magbitang
- V.Y. Lee
- et al.
- 2004
- Macromolecular Symposia
Supercritical CO2 treatments for semiconductor applications
- S. Gangopadhyay
- J.A. Lubguban
- et al.
- 2004
- MRS Proceedings 2004
Analysis of an extreme low-κ organosilicate dielectric film exposed to representative plasmas and to a restorative process
- M. Colburn
- S.V. Nitta
- et al.
- 2003
- AMC 2003
Effects of templating byproducts on adhesion of nanoporous dielectric films
- D. Maidenberg
- W. Volksen
- et al.
- 2003
- IITC 2003
Creating nanoporosity by selective extraction of porogens using supercritical carbon dioxide/cosolvent processes
- B. Lahlouh
- T. Rajagopalan
- et al.
- 2003
- MRS Proceedings 2003
Radiation effects in low dielectric constant methyl-silsesquioxane films
- Mihail P. Petkov
- Kelvin G. Lynn
- et al.
- 2002
- IEEE TNS
Pyrene fluorescence as a molecular probe of miscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications
- Q.R. Huang
- David Mecerreyes
- et al.
- 2002
- MRS Proceedings 2002
Templating nanoporosity in organosilicates with well-defined branched macromolecules and block copolymers
- J.L. Hedrick
- M. Trollsas
- et al.
- 1999
- American Chemical Society, Polymer Preprints, Division of Polymer Chemistry