Stability and oxidation behavior of Ir thin film electrodes on Si and SiO2
- K.L. Saenger
- A. Grill
- et al.
- 1998
- MRS Fall Meeting 1998
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(Ba,Sr)TiO3 dielectrics for future stacked-capacitor DRAM
- D.E. Kotecki
- J.D. Baniecki
- et al.
- 1999
- IBM J. Res. Dev