Thin-film gas sensor implemented on a low-power-consumption micromachined silicon structure
- Vincenzo Guidi
- Gian Carlo Cardinali
- et al.
- 1998
- Sensors and Actuators, B: Chemical
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.