Energy flow in light-coupling masks for lensless optical lithography
- Olivier J. F. Martin
- Nicolas B. Piller
- et al.
- 1998
- Optics Express
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Light-coupling masks: An alternative, lensless approach to high-resolution optical contact lithography
- Heinz Schmid
- Hans Biebuyck
- et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures