Step permeability and the relaxation of biperiodic gratings on si(001)
- S. Tanaka
- N.C. Bartelt
- et al.
- 1997
- Physical Review Letters
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4 results for S. Tanaka
Atomic step dynamics on periodic semiconductor surface structures
- Jack M. Blakely
- So Tanaka
- et al.
- 1999
- Journal of Electron Microscopy
Atomic step distributions on annealed periodic Si(001) gratings
- S. Tanaka
- C.C. Limbach
- et al.
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Fabrication of arrays of large step-free regions on Si(001)
- So Tanaka
- C.C. Umbach
- et al.
- 1996
- Applied Physics Letters