Method for improving stability of plasma ignition in a multi-cathode magnetron PVD system
- Jessica Gruss-Gifford
- V. Mehta
- et al.
- 2020
- ASMC 2020
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3 results for Gabriel Rodriguez
Study of titanium nitride underlayer properties and its influence on tungsten growth
- Shanti Pancharatnam
- J. Wynne
- et al.
- 2018
- ASMC 2018
Study of TiN and TaN underlayer properties and their influence on W growth
- Shanti Pancharatnam
- Gabriel Rodriguez
- et al.
- 2019
- IEEE Trans Semicond Manuf