Stoichiometry reversal and depth-profiling in the growth of thin oxynitride films with N2O on Si(100) surfaces
- D.G.J. Sutherland
- H. Akatsu
- et al.
- 1996
- Journal of Electron Spectroscopy and Related Phenomena
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3 results for D.G.J. Sutherland
Stoichiometry reversal in the growth of thin oxynitride films on Si(100) surfaces
- D.G.J. Sutherland
- H. Akatsu
- et al.
- 1995
- Journal of Applied Physics
Surface and interface analysis at 3rd generation light sources
- F.J. Himpsel
- H. Akatsu
- et al.
- 1995
- Progress in Surface Science