Role of the chamber wall in low-pressure high-density etching plasmas
- James A. O'Neill
- Jyothi Singh
- 1995
- Journal of Applied Physics
Publications
3 results for James A. O'Neill
Ultraviolet absorption spectroscopy for the detection of CF2 in high-density plasmas
- James A. O'Neill
- Jyothi Singh
- 1994
- Journal of Applied Physics
Infrared absorption spectroscopy for monitoring condensible gases in chemical vapor deposition applications
- James A. O'neill
- Michael L. Passow
- et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films