Clog-free translocation of long DNA in nanofluidic pillar arrays and 30 nm wide channels: A fabrication and hydrodynamic study
- Chao Wang
- Robert L. Bruce
- et al.
- 2014
- MicroTAS 2014
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48 results for Qinghuang Lin
Measurement of bandgap energies in low-k organosilicates
- M.T. Nichols
- Weiyi Li
- et al.
- 2014
- Journal of Applied Physics
Dielectric damage
- H. Ren
- S. Banna
- et al.
- 2014
- ECS Transactions
200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules
- C. Wang
- S.W. Nam
- et al.
- 2013
- IEDM 2013
The effects of plasma exposure and vacuum ultraviolet irradiation on photopatternable low-k dielectric materials
- M.T. Nichols
- K. Mavrakakis
- et al.
- 2013
- Journal of Applied Physics
The effects of vacuum ultraviolet radiation on low-k dielectric films
- H. Sinha
- H. Ren
- et al.
- 2012
- Journal of Applied Physics
The effects of plasma exposure on low-k dielectric materials
- J.L. Shohet
- H. Ren
- et al.
- 2012
- SPIE Advanced Lithography 2012
Quantifying the elasticity and viscosity of geometrically confined polymer films via thermal wrinkling
- Edwin P. Chan
- Qinghuang Lin
- et al.
- 2012
- Journal of Polymer Science, Part B: Polymer Physics
Facile chemical rearrangement for photopatterning of POSS derivatives
- Jitendra Rathore
- Qiu Dai
- et al.
- 2011
- Journal of Materials Chemistry
Extending photo-patternable low-κ concept to 193 nm lithography and e-beam lithography
- Qinghuang Lin
- Alshakim Nelson
- et al.
- 2011
- SPIE Advanced Lithography 2011