Weiyi Li, Dongfei Pei, et al.
JVSTA
In this work, experimental measurements of the electronic band gap of low-k organosilicate dielectrics will be presented and discussed. The measurement of bandgap energies of organosilicates will be made by examining the onset of inelastic energy loss in core-level atomic spectra using X-ray photoelectron spectroscopy. This energy serves as a reference point from which many other facets of the material can be understood, such as the location and presence of defect states in the bulk or at the interface. A comparison with other measurement techniques reported in the literature is presented. © 2014 AIP Publishing LLC.
Weiyi Li, Dongfei Pei, et al.
JVSTA
J.L. Shohet, H. Ren, et al.
SPIE Advanced Lithography 2012
Weiyi Li, Dongfei Pei, et al.
Applied Physics Letters
H. Sinha, H. Ren, et al.
Journal of Applied Physics