Publications

3 results for Ko Akiteru

Defect detection strategies and process partitioning for single-expose EUV patterning
- - Luciana Meli
  - Karen Petrillo
  - et al.
- 2019
- J. Micro/Nanolithogr. MEMS MOEMS
Track based techniques to improve high-resolution EUV patterning defectivity
- - Naoki Shibata
  - Lior Huli
  - et al.
- 2018
- EUVL 2018
Defect detection strategies and process partitioning for SE EUV patterning
- - Luciana Meli
  - Karen Petrillo
  - et al.
- 2018
- SPIE Advanced Lithography 2018