The effect of material and process interactions on BEOL integration
- T. Spooner
- J.C. Arnold
- et al.
- 2009
- ECS Meeting 2009
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25 results for M. Sankarapandian
Property modifications of nanoporous pSiCOH dielectrics to enhance resistance to plasma-induced damage
- E. Todd Ryan
- Stephen M. Gates
- et al.
- 2008
- Journal of Applied Physics
Preparation and structure of porous dielectrics by plasma enhanced chemical vapor deposition
- S. Gates
- D. Neumayer
- et al.
- 2007
- Journal of Applied Physics
Submicron mapping of strained silicon-on-insulator features induced by shallow-trench-isolation structures
- Conal E. Murray
- M. Sankarapandian
- et al.
- 2007
- Applied Physics Letters
Synthesis of high refractive-index melt-stable aromatic polyphosphonates
- H. Shobha
- H. Johnson
- et al.
- 2001
- J Polym Sci Part A