The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
- H. Kim
- C. Lavoie
- et al.
- 2004
- Journal of Applied Physics
Publications
203 results for Christian Lavoie
Low-temperature formation of CoSi 2 in the presence of Au
- C. Detavernier
- C. Lavoie
- et al.
- 2004
- Journal of Applied Physics
Influence of Pt addition on the texture of NiSi on Si(001)
- C. Detavernier
- C. Lavoie
- 2004
- Applied Physics Letters
Diffusion in intermetallic compounds: The ordered Cu3Au rule, its history
- François M. D'Heurle
- Patrick Gas
- et al.
- 2004
- Zeitschrift fuer Metallkunde/Materials Research and Advanced Techniques
An off-normal fibre-like texture in thin films on single-crystal substrates
- C. Detavernier
- A.S. Özcan
- et al.
- 2003
- Nature
Towards implementation of a nickel silicide process for CMOS technologies
- C. Lavoie
- F.M. D'Heurle
- et al.
- 2003
- Microelectronic Engineering
Thermodynamics and kinetics of room-temperature microstructural evolution in copper films
- C. Detavernier
- S.M. Rossnagel
- et al.
- 2003
- Journal of Applied Physics
Thermal expansion of the isostructural PtSi and NiSi: Negative expansion coefficient in NiSi and stress effects in thin films
- C. Detavernier
- C. Lavoie
- et al.
- 2003
- Journal of Applied Physics
Two gates are better than one
- P. Solomon
- K.W. Guarini
- et al.
- 2003
- IEEE Circuits and Devices Magazine
Kinetics of agglomeration of NiSi and NiSi2 phase formation
- C. Detavernier
- A.S. Özcan
- et al.
- 2002
- MRS Proceedings 2002