Two-step codeposition process for enhanced C54-TiSi2 formation in the Ti-Si binary system
- A. Quintero
- M. Libera
- et al.
- 2001
- Journal of Applied Physics
Publications
203 results for Christian Lavoie
In situ and ex situ measurements of stress evolution in the cobalt-silicon system
- G.A. Lucadamo
- C. Lavoie
- et al.
- 2001
- Materials Research Society Symposium - Proceedings
Synchrotron x-ray diffraction and transmission electron microscopy studies of interfacial reaction paths and kinetics during annealing of fully-002-textured Al/TiN bilayers
- J.-S. Chun
- J.R.A. Carlsson
- et al.
- 2001
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Triple-self-aligned, planar double-gate MOSFETs: Devices and circuits
- K.W. Guarini
- P. Solomon
- et al.
- 2001
- Technical Digest-International Electron Devices Meeting
Exploring thin-film reactions by means of simultaneous x-ray surface roughness and resistance measurements
- C. Lavoie
- C. Cabral Jr.
- et al.
- 2001
- Defect and Diffusion Forum
Detection of cobalt silicide phase formations by ultrafast optical measurements
- C. Lavoie
- C. Cabral Jr.
- et al.
- 2000
- Thin Solid Films
Silicon-induced faceting of vicinal GaAs(001)
- S. Brennan
- G.B. Stephenson
- et al.
- 2000
- Journal of Applied Physics
Dissociation of dilute immiscible copper alloy thin films
- K. Barmak
- G.A. Lucadamo
- et al.
- 2000
- Journal of Applied Physics
Mechanisms for enhanced formation of the C54 phase of titanium silicide ultra-large-scale integration contacts
- J.M.E. Harper
- C. Cabral Jr.
- et al.
- 2000
- Annual Review of Materials Science
Microstructural analysis of copper interconnections using picosecond ultrasonics
- James M.E. Harper
- Sandra G. Malhotra
- et al.
- 2000
- Materials Research Society Symposium-Proceedings