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David P. Klaus- Sarunya Bangsaruntip
- A. Majumdar
- et al.
- 2010
- VLSI Technology 2010
- M. Guillorn
- J. Chang
- et al.
- 2008
- VLSI Technology 2008
- D. Edelstein
- C.R. Davis
- et al.
- 2004
- IITC 2004
- A. Grill
- D. Edelstein
- et al.
- 2004
- IITC 2004
- D. Edelstein
- H.S. Rathore
- et al.
- 2004
- IRPS 2004
- D. Edelstein
- H.S. Rathore
- et al.
- 2004
- IRPS 2004
- D. Edelstein
- C. Uzoh
- et al.
- 2001
- ADMETA 2001
- Keith T. Kwietniak
- Michael G. Rosenfield
- et al.
- 1993
- Microlithography 1993