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David P. Klaus- A.D.K. Finck
- S. Carnevale
- et al.
- 2021
- Physical Review Applied
- Abhinav Kandala
- Ken X. Wei
- et al.
- 2021
- Physical Review Letters
- J. Stehlik
- D.M. Zajac
- et al.
- 2021
- Physical Review Letters
- Adam Pyzyna
- Robert L. Bruce
- et al.
- 2015
- VLSI Technology 2015
- 2015
- SPIE Advanced Lithography 2015
- Sarunya Bangsaruntip
- K. Balakrishnan
- et al.
- 2013
- IEDM 2013
- Ernst Kratschmer
- James J. Bucchignano
- et al.
- 2013
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures