An optimal liner for copper damascene interconnects
- D. Edelstein
- C. Uzoh
- et al.
- 2001
- ADMETA 2001
Publications
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43 results for David P. Klaus
Properties development during curing of low dielectric-constant spin-on glasses
- R.F. Cook
- E. Liniger
- et al.
- 1998
- MRS Spring Meeting 1998
Polymeric organic-inorganic hybrid nanocomposites: Preparation of polyimide-modified poly(silsesquioxane) using functionalized poly(amic acid alkyl ester) precursors
- J.L. Hedrick
- H.J. Cha
- et al.
- 1997
- Macromolecules
Nanoscopically engineered organic-inorganic hybrids as low dielectric constant, high modulus insulating materials for microelectronic applications
- J.L. Hedrick
- R.D. Miller
- et al.
- 1997
- American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Ultra-low power 0.1 μm CMOS
- Y. Mii
- S.J. Wind
- et al.
- 1994
- VLSI Technology 1994
High Performance 0.1 μm CMOS Devices with 1.5 V Power Supply
- Y. Taur
- S.J. Wind
- et al.
- 1993
- IEDM 1993
Mixed e-beam/optical lithography process for the fabrication of sub-0.25-μm poly gates
- Keith T. Kwietniak
- Michael G. Rosenfield
- et al.
- 1993
- Microlithography 1993
A room temperature 0.1 μm CMOS on SOI
- G. Shahidi
- C. Blair
- et al.
- 1993
- VLSI Technology 1993
A high performance 0.15 μm CMOS
- G. Shahidi
- J. Warnock
- et al.
- 1993
- VLSI Technology 1993
Fabrication and characterization of compact 100nm scale metal oxide semiconductor field effect transistors
- C. Reeves
- S.J. Wind
- et al.
- 1993
- Microelectronic Engineering