Stress liner effects for 32-nm SOI MOSFETs with HKMG
- Ming Cai
- Karthik Ramani
- et al.
- 2010
- IEEE T-ED
Publications
Date
Featured collections
Popular topics
22 results for Michael Belyansky
Study of silicon strain in shallow trench isolation
- M. Belyansky
- N. Klymko
- et al.
- 2010
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films