Ultrasonic and dip resist development processes for 50 nm device fabrication
- K.L. Lee
- J. Bucchignano
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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53 results for Jim Bucchignano
Spatially confined chemistry: Fabrication of Ge quantum dot arrays
- J.R. Heath
- R.S. Williams
- et al.
- 1996
- Journal of Physical Chemistry
Lithography and fabrication processes for sub-100 nm scale complementary metal-oxide semiconductor
- S.J. Wind
- Y. Taur
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Probing the limits of silicon-based nanoelectronics
- S.J. Wind
- Y. Taur
- et al.
- 1995
- MRS Spring Meeting 1995
In situ x-ray diffraction analysis of the C49-C54 titanium silicide phase transformation in narrow lines
- R.A. Roy
- L. Clevenger
- et al.
- 1995
- Applied Physics Letters
Ultra-low power 0.1 μm CMOS
- Y. Mii
- S.J. Wind
- et al.
- 1994
- VLSI Technology 1994
Minimum critical length for superconductivity in one-dimensional wires
- C.C. Chi
- P. Santhanam
- et al.
- 1994
- Physical Review B
High Performance 0.1 μm CMOS Devices with 1.5 V Power Supply
- Y. Taur
- S.J. Wind
- et al.
- 1993
- IEDM 1993
Fabrication and characterization of compact 100nm scale metal oxide semiconductor field effect transistors
- C. Reeves
- S.J. Wind
- et al.
- 1993
- Microelectronic Engineering
Resistance anomaly near the superconducting transition temperature in short aluminum wires
- P. Santhanam
- C.C. Chi
- et al.
- 1991
- Physical Review Letters