Scanning excimer ablation system
- Douglas S. Goodman
- Thomas Ainsworth
- et al.
- 1992
- LEOS 1992
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49 results for Alan E. Rosenbluth
Scanning differential interferometer to measure index heterogeneity
- Norman Bobroff
- Alan E. Rosenbluth
- et al.
- 1992
- Applied Optics
Evaluation of highly corrected optics by measurement of the strehl ratio
- Norman Bobroff
- Alan E. Rosenbluth
- 1992
- Applied Optics
Understanding high numerical aperture optical lithography
- D. Flagello
- Alan E. Rosenbluth
- et al.
- 1992
- Microelectronic Engineering
Optical sources of non-linearity in heterodyne interferometers
- Alan E. Rosenbluth
- N. Bobroff
- 1990
- Precision Engineering
Bench evaluation of lithographic lenses from measurements of the point spread function
- Norman Bobroff
- Petra Fadi
- et al.
- 1989
- Proceedings of SPIE 1989
Condenser aberrations in Köhler illumination
- Douglas S. Goodman
- Alan E. Rosenbluth
- 1989
- Proceedings of SPIE 1989
DETERMINATION OF THICKNESS ERRORS AND BOUNDARY ROUGHNESS FROM THE MEASURED PERFORMANCE OF A MULTILAYER COATING.
- E. Spiller
- Alan E. Rosenbluth
- 1986
- Opt. Eng.
Determination of thickness errors and boundary roughness from the measured performance of a multilayer coating
- Eberhard Spiller
- Alan E. Rosenbluth
- 1989
- Proceedings of SPIE 1989