Reducing line edge roughness in si and sin through plasma etch chemistry optimization for photonic waveguide applications
- Nathan Marchack
- Marwan Khater
- et al.
- 2017
- SPIE Advanced Lithography 2017
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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225 results for William Green
A monolithic CMOS compatible photonic/electronic platform and short reach data link transmitter figures of merit
- Douglas M. Gill
- Jessie C. Rosenberg
- et al.
- 2016
- AVFOP 2016
Silicon photonic on-chip trace-gas spectroscopy of methane
- Eric J. Zhang
- L. Tombez
- et al.
- 2016
- CLEO 2016
Distributed backscattering due to stochastic defects in production O-band Si photonic waveguides
- Bo Peng
- Jessie C. Rosenberg
- et al.
- 2016
- CLEO 2016
Flexible silicon photonic transmitter with segmented modulator and 32 nm CMOS driver IC
- T.N. Huynh
- Nicolas Dupuis
- et al.
- 2016
- CLEO 2016
Monolithic silicon photonics at 25 Gb/s
- Jason S. Orcutt
- Douglas M. Gill
- et al.
- 2016
- OFC 2016
Evanescent field phase shifting in a silicon nitride waveguide using a coupled silicon slab
- Asger S. Jensen
- Leif Katsuo Oxenlowe
- et al.
- 2015
- GFP 2015
A monolithic 56 Gb/s CMOS integrated nanophotonic PAM-4 transmitter
- Chi Xiong
- Douglas M. Gill
- et al.
- 2015
- OI 2015
Demonstration of error free operation up to 32 Gb/s from a CMOS integrated monolithic nano-photonic transmitter
- Douglas M. Gill
- Chi Xiong
- et al.
- 2015
- CLEO 2015
An o-band metamaterial converter interfacing standard optical fibers to silicon nanophotonic waveguides
- Tymon Barwicz
- Alexander Janta-Polczynski
- et al.
- 2015
- OFC 2015