Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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45 results for Anita Madan

On implementation of embedded Phosphorus-doped SiC stressors in SOI nMOSFETs
- - Zhibin Ren
  - G. Pei
  - et al.
- 2008
- VLSI Technology 2008
Strained Si channel MOSFETs with embedded silicon carbon formed by solid phase epitaxy
- - Yaocheng Liu
  - Oleg Gluschenkov
  - et al.
- 2007
- VLSI Technology 2007
Hole transport in nanoscale p-type MOSFET SOI devices with high strain
- - H. Nayfeh
  - S.-J. Jeng
  - et al.
- 2007
- DRC 2007
65nm Cu integration and interconnect reliability in low stress K=2.75 SiCOH
- - V. McGahay
  - G. Bonilla
  - et al.
- 2006
- IITC 2006
Reliability, yield, and performance of a 90 nm SOI/Cu/SiCOH technology
- - D. Edelstein
  - C.R. Davis
  - et al.
- 2004
- IITC 2004
Comprehensive reliability evaluation of a 90 nm CMOS technology with Cu/PECVD low-k BEOL
- - D. Edelstein
  - H.S. Rathore
  - et al.
- 2004
- IRPS 2004
Comprehensive reliability evaluation of a 90 nm CMOS technology with Cu/PECVD low-k BEOL
- - D. Edelstein
  - H.S. Rathore
  - et al.
- 2004
- IRPS 2004
Extreme-low k porous pSiCOH dielectrics prepared by PECVD
- - H. You
  - Petra Mennell
  - et al.
- 2018
- JVSTB
Quantification of local strain distributions in nanoscale strained SiGe FinFET structures
- - Shogo Mochizuki
  - Conal E. Murray
  - et al.
- 2017
- Journal of Applied Physics
High-precision deformation mapping in finFET transistors with two nanometre spatial resolution by precession electron diffraction
- - David Cooper
  - N. Bernier
  - et al.
- 2017
- Applied Physics Letters