Laser bandwidth and other sources of focus blur in lithography
- Timothy Brunner
- Daniel Corliss
- et al.
- 2006
- Journal of Microlithography, Microfabrication and Microsystems
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.