Laser bandwidth and other sources of focus blur in lithography
- Timothy Brunner
- Daniel Corliss
- et al.
- 2006
- Journal of Microlithography, Microfabrication and Microsystems
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When is bilayer thin-film imaging suitable: Comparison with single layer resists
- Scott Halle
- Alan Thomas
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering