High performance 14nm SOI FinFET CMOS technology with 0.0174μm2 embedded DRAM and 15 levels of Cu metallization
- C.-H.C-H. Lin
- Brian Greene
- et al.
- 2014
- IEDM 2014
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7 results for Emre Alptekin
Contacts in advanced CMOS: History and emerging challenges
- Christian Lavoie
- Praneet Adusumilli
- et al.
- 2017
- ECS Meeting 2017 - New Orleans
Challenges in contact technologies for planar/non-planar Si technologies
- Praneet Adusumilli
- Emre Alptekin
- et al.
- 2014
- ECS Meeting 2014
10nm FINFET technology for low power and high performance applications
- D. Guo
- H. Shang
- et al.
- 2014
- ICSICT 2014
High performance bulk planar 20nm CMOS technology for low power mobile applications
- Huiling Shang
- Sameer Jain
- et al.
- 2012
- VLSI Technology 2012
Gas cluster ion beam assisted NiPt germano-silicide formation on SiGe
- Ahmet S. Ozcan
- Christian Lavoie
- et al.
- 2016
- Journal of Applied Physics
Understanding short channel mobility degradation by accurate external resistance decomposition and intrinsic mobility extraction
- Tao Chu
- Reinaldo A. Vega
- et al.
- 2015
- Journal of Applied Physics